December 11, 2017
Comments Off on Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures
Posted in: EMBEDDED, IEEE 2017
Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures Abstract: In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 μm 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure […]
December 11, 2017
Comments Off on Optical self-excitation and detection for inertial MEMS Sensors
Posted in: EMBEDDED, IEEE 2017
Optical self-excitation and detection for inertial MEMS Sensors Abstract: We report on the development of an optical self-excitation and detection method to allow for high stability operation of inertial MEMS sensors. A single constant amplitude laser beam is used to both drive and optically interrogate the resonant frequency of a MEMS resonator. A parametric study […]